摘要 |
FIELD: analysis of materials. SUBSTANCE: characteristic feature of process lies in conducting concentration of impurities in region of high vacuum of mass spectrometer after metering valve by way of partial condensation of xenon at temperature of 77 K. In this case impurities present in xenon and displaying higher values of pressure of saturated vapors and lesser as compared with xenon pressure in flow enter freely ion source of mass spectrometer. EFFECT: markedly raised sensitivity and accuracy of mass spectrometric process of measurements. 3 tbl
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