发明名称 |
Manipulator apparatus with low-cost compliance |
摘要 |
A compliance assembly is disclosed for use in a semiconductor tester testhead stand. The compliance assembly includes an airspring having compliance along a plurality of axes and a containment vessel adapted for receiving the airspring. The containment vessel includes walls that, when the airspring is loaded, control the compliance along the plurality of axes.
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申请公布号 |
US6722215(B2) |
申请公布日期 |
2004.04.20 |
申请号 |
US20020176261 |
申请日期 |
2002.06.18 |
申请人 |
CARADONNA MICHAEL;PATEL SAROSH |
发明人 |
CARADONNA MICHAEL;PATEL SAROSH |
分类号 |
G01R31/28;(IPC1-7):G01D21/00 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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