发明名称 |
Microchip fabrication chamber wafer detection |
摘要 |
A microchip fabrication chamber has a pedestal adapted to retain a wafer during processing steps conducted within the chamber. A lift mechanism including a plurality of lift mechanism pins engages and disengages a wafer to the pedestal. A sensor associated with the tip of at least one of the lift mechanism pins detects the presence of the wafer.
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申请公布号 |
US6723201(B2) |
申请公布日期 |
2004.04.20 |
申请号 |
US20020081665 |
申请日期 |
2002.02.21 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHEN WEN-MING;WANG WEN-CHI |
分类号 |
C23C16/458;H01L21/00;(IPC1-7):H01L21/00;C23C16/00 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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