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发明名称
摘要
申请公布号	JP3520844(B2)	申请公布日期	2004.04.19
申请号	JP20000241110	申请日期	2000.08.09
申请人		发明人
分类号	C23F4/04;C23F1/08;(IPC1-7):C23F1/08	主分类号	C23F4/04
代理机构		代理人
主权项
地址

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