| 摘要 |
PURPOSE: An apparatus and a method are provided to completely remove air bubble from the stacked structure and achieve improved smoothness of flatness. CONSTITUTION: An apparatus comprises a pump(15) for vacuuming the interior of an inner chamber(10) through a first vacuum line(11) and a second vacuum line(21); and a pressure changing unit(25) for changing the interior of an outer chamber(20) from the vacuum state into a pressure higher than the atmospheric pressure through a pressure line(22). The apparatus has a double chamber structure including the inner chamber and the outer chamber. The inner chamber has a stacked structure(30) mounted in the inner chamber. The stacked structure includes a transparent plate, an adhesive layer, and an electromagnetic interference shielding layer. The inner chamber is covered by a cover(12) made of a material having a fluidity. The first vacuum line is arranged to penetrate from the inside to the outside of the inner chamber. The inner chamber is mounted in the outer chamber, and the pressure line is arranged to penetrate from the inside to the outside of the outer chamber. The second vacuum line is coupled to the first vacuum line protruded from the inner chamber. The outer chamber is equipped with a heater(23). |
