| 摘要 |
PURPOSE: A conveyance device for conveying sequentially band-shaped works to without adhering particles to the belt-shaped works is provided to prevent defects due to particles by forming a holding face of the band-shaped work with a porous sintered body. CONSTITUTION: A conveyance device for band-shaped work includes a work stage, a box body, and a gas feeding port. The work stage(70) is used for forming a holding face of a band-shaped work by a porous sintered body(71). The porous sintered body is installed on one side face of the box body(72). The gas feeding port is provided in the sintered body or in the vicinity of the sintered body. Only vacuum is supplied into the box body and only gas is supplied into the gas feeding port.
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