发明名称 SUBSTRATE TREATMENT APPARATUS AND METHOD FOR ITS SCHEDULING
摘要 PROBLEM TO BE SOLVED: To prevent an adverse influence to a schedule due to aging by reflecting an automatically measured real operation requiring time upon the schedule. SOLUTION: A method for the scheduling includes steps of deciding a timetable by a scheduling functional unit 39 while an operating required time previously stored in a storage unit 57 is referred, measuring the real operation required time of each operation by a real operation required time measuring functional unit 43, and updating the operating required time of the operation by the real operation required time by an operating required time data updating functional unit 45. Accordingly, the operating required time changed according to aging is replaced with a real required operating time, the timetable can be formed by the updated operating required time at a next scheduling time, and the adverse influence to the scheduling due to the aging can be prevented. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004119451(A) 申请公布日期 2004.04.15
申请号 JP20020277282 申请日期 2002.09.24
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 YAMAMOTO SHINKO
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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