发明名称 VACUUM PUMP
摘要 PROBLEM TO BE SOLVED: To estimate a temperature of a rotor of a pump and thereby properly secure creep life of the rotor, by measuring a temperature of exhaust gas with high accuracy. SOLUTION: A rotor temperature measuring means 30 is constituted of a stay 31 made of material low in heat conductivity, and a contact type temperature sensor 32 installed on the stay 31. The stay 31 is disposed to a fixing member of a main flow passage R of gas molecules and positioned near the rotor 20, so that the temperature sensor 32 is thermally insulated from peripheral members and is arranged at a position where the temperature sensor is collided with the gas molecules to measure the exhaust gas temperature with high accuracy, and then the temperature of the rotor 20 is estimated from the measured gas temperature. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004116319(A) 申请公布日期 2004.04.15
申请号 JP20020277643 申请日期 2002.09.24
申请人 BOC EDWARDS TECHNOLOGIES LTD 发明人 NONAKA MANABU;MIWATA TORU
分类号 F04D19/04;(IPC1-7):F04D19/04 主分类号 F04D19/04
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