发明名称 Method and a device for producing an adhesive surface on a substrate
摘要 A method and a device for producing an adhesive surface on a substrate which can be bonded to another substrate. In an implementation, the technique includes treating the surface of the substrate by wet chemical etching to remove an oxide layer and to provide a hydrophobic surface, and exposing the etched hydrophobic surface to a gaseous ozone atmosphere to provide a dry hydrophilic surface. A device for producing an adhesive surface on a substrate according to an implementation includes a bath with an etchant for removing an oxide layer from the surface of the substrate and to produce a hydrophobic surface, and a container having an inner volume that surrounds the bath. The inner volume also includes a gaseous ozone atmosphere to produce a dry hydrophilic surface.
申请公布号 US2004069321(A1) 申请公布日期 2004.04.15
申请号 US20030664781 申请日期 2003.09.16
申请人 MALEVILLE CHRISTOPHE;MAUNAND-TUSSOT CORINNE 发明人 MALEVILLE CHRISTOPHE;MAUNAND-TUSSOT CORINNE
分类号 H01L21/306;H01L21/00;H01L21/02;H01L21/18;H01L21/316;(IPC1-7):C23G1/02 主分类号 H01L21/306
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