| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard carbon film sliding member which has excellent low friction performance in lubricating oil. SOLUTION: By atom %, 4 to 20% of at least one or more kinds of metal elements selected from the group consisting of the group IIb, III, IV, Va, VIa, VIIa and VIII in the Periodic Table, and 6 to 30% oxygen are incorporated at least in the surface layer of a hard carbon film, so that the hard carbon film sliding member having low friction performance, e.g. satisfying a friction coefficient of≤0.04 in lubricating oil is realized. COPYRIGHT: (C)2004,JPO
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