| 摘要 |
PROBLEM TO BE SOLVED: To provide a barrier film having a high level of barrier properties as well as good transparency, a method for manufacturing the same, a packaging container using the barrier film, and a laminate such as an image display medium. SOLUTION: This laminate with a gas barrier film has a gas barrier film on at least one side of a substrate. The gas barrier film is formed by forming a film using silicon nitride and/or silicon oxinitride and then subjecting the gas barrier film to discharge treatment with an oxidizing gas. Specifically, the laminate with a gas barrier film is a laminate of a silicon oxinitride film formed by irradiating a silicon nitride film or a nitrogen-rich silicon oxinitride film, provided on at least one side of a substrate such as a film, with oxygen plasma. Since oxygen has higher reactivity with silicon than with nitrogen and the like, oxygen can be rapidly reacted with an unbonded hand or the like to promote the clarification. COPYRIGHT: (C)2004,JPO
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