发明名称 |
Devices and methods for detecting orientation and shape of an object |
摘要 |
Embodiments of the present invention provide a system and method for receiving and dropping-off a horizontally oriented flat substrate, for example a semiconductor wafer, on a substrate support structure and verifying the correct positioning and orientation (level) of the substrate. Additional embodiments provide a system and method for indicating the presence or absence, orientation and concavity or convexity of a substrate.
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申请公布号 |
US2004073328(A1) |
申请公布日期 |
2004.04.15 |
申请号 |
US20020268138 |
申请日期 |
2002.10.09 |
申请人 |
DE HAAS MARTIEN JOHAN;MARIA TERHORST HERMANUS JOZEF CLEMENS;VRUGT ERIK TER;KEYZER THEO DE |
发明人 |
DE HAAS MARTIEN JOHAN;MARIA TERHORST HERMANUS JOZEF CLEMENS;VRUGT ERIK TER;KEYZER THEO DE |
分类号 |
H01L21/00;H01L21/683;(IPC1-7):G06F19/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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