发明名称 METHOD OF ELECTROLESS PLATING
摘要 <p>A method of electroless plating which comprises supplying an electroless plating solution, and then placing the plating solution under a condition for accelerating a reaction to thereby start the formation of a plated coating. In the step of supplying the electroless plating solution, no or little plated coating is formed, which allows the improvement of the uniformity of the resultant electrolessly plated coating, through supplying the plating solution over whole the surface of a substrate before the start of regular formation of the plated coating.</p>
申请公布号 WO2004031447(A1) 申请公布日期 2004.04.15
申请号 WO2003JP06500 申请日期 2003.05.23
申请人 TOKYO ELECTRON LIMITED;MARUMO, YOSHINORI 发明人 MARUMO, YOSHINORI
分类号 B05D1/00;C23C18/16;C23C18/31;C25D5/02;H01L21/288;(IPC1-7):C23C18/31 主分类号 B05D1/00
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