发明名称 Drucksensoreinheit
摘要 A pressure sensor unit which comprises (i) a housing (1), (ii) pressure sensor members installed therein including a mount (3), the bottom of which is fixed to the inner base of the housing (1) by means of an adhesive (2), a sensor chip (4) firmly bonded to the top of the mount, terminals (5) disposed on the inner base of the housing and bonding wires (6) connecting the sensor chip (4) to their respective terminals (5), and (iii) a sealant (8) filling the housing (1) so that all the pressure sensor members are completely buried therein; with the terminals (5) being covered with a fluorinated polymer-containing composition functioning as adhesive (7) in at least an upper part thereof and with the sealant (8) being a fluorinated polymer-containing gel material, wherein the composition as adhesive (7) is similar in fluorinated polymer to the gel material. <IMAGE>
申请公布号 DE60004454(T2) 申请公布日期 2004.04.15
申请号 DE2000604454T 申请日期 2000.05.31
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 SHIONO, MIKIO;FUKUDA, KENICHI
分类号 G01L9/00;G01L9/04;G01L19/06;H01L29/84 主分类号 G01L9/00
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