发明名称 ULTRSONIC WASHING EQUIPMENT AND ULTRASONIC WASHING METHOD
摘要 <p>An ultrasonic washing method capable of increasing the efficiency of the retrieval and storage of a washed object from and into a washing tank when the washed object is washed by ultrasonic wave and preventing the size of the washing equipment from being vertically increased, comprising the steps of providing an inlet (6) and an outlet (7) in the side walls of the washing tank (2) and doors (6h) and (7h) are formed openable, putting, from the inlet (6), the washed object (fed body (8)) fed in a feed route (3) on the upstream side, closing the inlet (6) by the door (6h) for sealing, leading cleaning solvent deaerated in a storage tank into the washing tank (2), washing the washed object by ultrasonic wave, returning the cleaning solvent in the washing tank (2) to the storage tank, opening the door (7h) at the outlet (7), delivering the washed object (fed body (8)) from the outlet (7) to the side through a feed route (4) on the downstream side, and repeating the steps above.</p>
申请公布号 WO2004030838(A1) 申请公布日期 2004.04.15
申请号 WO2003JP12833 申请日期 2003.10.07
申请人 STAR CLUSTER CO., LTD.;TSK CO.;AISIN AW CO., LTD.;SHIBANO, MIYUKI;OKUNO, SHIN;SAKAKIBARA, MASATO 发明人 SHIBANO, MIYUKI;OKUNO, SHIN;SAKAKIBARA, MASATO
分类号 B08B3/04;B08B3/10;B08B3/12;C23G5/00;H01L21/00;(IPC1-7):B08B3/12;H01L21/304 主分类号 B08B3/04
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