摘要 |
<p>An X-ray generator (1) has a spherical vacuum vessel (2). A mirror (first mirror) (10) is incorporated into an upstream-side opening (2a) in the vacuum vessel (2). This mirror (10) constitutes part of the upstream-side wall of the vacuum vessel (2). The reflecting surface (10a) of the mirror (10) is positioned in the vacuum vessel (2), with the back (10b) of the mirror (10) exposed to the atmosphere outside the vacuum vessel (2). The back (10b) of the mirror (10) has a water-cooled jacket (15) attached thereto. Since the water-cooled jacket (15) is disposed on the atmosphere-side of the mirror back (10b), the laying, etc. of a piping (15a) are easy and the arrangement is simple. Further, since the water-cooled jacket (15) is exposed to the atmosphere, replacement and maintenance are easy.</p> |