| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve detecting precision of the end point of an interlayer dielectric. <P>SOLUTION: A reflection-preventing film 4 is formed flatly on the interlayer dielectric 3, and the end point of the interlayer dielectric 3 is detected by monitoring reflected light intensity from the interlayer dielectric 3 while polishing the interlayer dielectric 3. <P>COPYRIGHT: (C)2004,JPO |
