| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation device, by which over a wide range can be irradiated with vacuum ultraviolet rays, even in the air by arranging a reflecting surface 2a on the side of an excimer lamp 1, and at the same time, by feeding an irradiation gas G<SB>1</SB>. SOLUTION: The surface of an object to be processed W is irradiated with vacuum ultraviolet rays emitted from the excimer lamp 1, arranged in the air in the ultraviolet irradiation device. The ultraviolet ray irradiation device is so constituted that a reflecting pipe 2 is arranged on the side of the excimer lamp 1, the reflecting face 2a is formed to the reflecting pipe 2; and at the same time, the irradiation gas G<SB>1</SB>mainly comprising an inert gas, is sent out from a nozzle hole 2b opened to the reflecting face 2a. COPYRIGHT: (C)2004,JPO
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