| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for joining by which metallic joining sections having activated surfaces can be joined satisfactorily to each other by surely performing prescribed cleaning on the joining faces of the joining sections, by preventing the occurrence of such a trouble that a held object to be joined is blown off at the time of supplying a reactive gas in a plasma cleaning step. SOLUTION: In the joining method, the metallic joining sections 2 and 3 of the objects are joined to each other after the joining faces of the sections 2 and 3 are cleaned with a plasma generated while a gas is supplied at the time of joining the objects respectively having the joining sections 2 and 3 on the surfaces of substrates. In the plasma cleaning step, the objects are held by sucking the objects through suction holes provided in the holding member of the objects. The joining device applies this method. COPYRIGHT: (C)2004,JPO
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