| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus which improves vacuum treatment characteristics and has excellent productivity. SOLUTION: The vacuum treatment apparatus has a treatment container 100, an exhaustion means 150 for the treatment container 100, exhaustion piping 101 communicating the treatment container 100 and the exhaustion means 150, and an exhaust port 110. The apparatus has a clean air introducing means 111 for introducing clean air into the treatment container 100 at a position facing the exhaust port 110 provided on the treatment container 100, and has a clean air discharging means 107 for discharging the introduced clean air into the exhaustion piping 101. COPYRIGHT: (C)2004,JPO
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