| 摘要 |
A flow sensor (5) is described, in particular for analysis of gas flows, having a substrate (10) and at least one sensor component (15) which is sensitive to a flow of a medium, the sensor component (15) being separated from the substrate (10) in at least some areas by a region that is a poor heat conductor compared to the substrate (10). In addition, the region (11, 11', 14) having poor heat conductivity is a porous silicon region (11) or a porous silicon oxide region (11'), or the region (11, 11', 14) having poor heat conductivity is a recess (14) in the surface of the substrate (10) above which the sensor element (15) is situated on at least one web (13) which bridges the recess (14) and is at least mostly unsupported. The flow sensor (5) described here is particularly suitable for angle-dependent detection of a gas flow.
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