| 摘要 |
<P>PROBLEM TO BE SOLVED: To properly secure a creep life of a rotor, by monitoring a temperature of the rotor of a pump with high accuracy. <P>SOLUTION: A vacuum pump has a rotor temperature measuring means constituted of an infrared ray temperature sensor 32 connected to an optical fiber 31, and a signal converter 33 converting an sensor output from the infrared ray temperature sensor into an electric signal. An acceptance surface 31-1a at a tip of the optical fiber 31 is exposed from an opening part 34a of a wall face opposite to the rotor 20, the infrared ray temperature sensor 32 and signal converter 33 are spaced from the rotor 20 and are arranged at positions other than a main flow passage R of gas molecules. <P>COPYRIGHT: (C)2004,JPO |
