摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a functional multilayered film wherein regularity can be provided to arrangement of fine metal bodies in film thickness and film surface directions and to provide its manufacturing method. <P>SOLUTION: The functional multilayered film consists of functional films each formed by fixing multiple fine metal bodies 4 to a matrix 1 consisting of a dielectric. The matrix 1 is formed by laminating a dielectric thin film 2 film-deposited in a prescribed thickness and a metal arranged thin film 6 consisting of a metal pattern 5 which is formed on a film surface 3 of the dielectric thin film 2 and wherein the multiple fine metal bodies 4 are optionally arranged and the fine metal body 4 is an island-shaped thin film having an optional shape in the film surface direction. <P>COPYRIGHT: (C)2004,JPO</p> |