| 摘要 |
PROBLEM TO BE SOLVED: To efficiently and economically perform working without short-circuiting terminals when aligning the heights of the heads of terminal substrates each having a plurality of terminals are protruded extremely closely like interposers. SOLUTION: In the terminal substrate provided with a plurality of terminals to form ball electrodes, the terminals are protruded from the surface of the substrate coated with a resist film, the substrate is then held with a rotatable chuck table 17 while leaving the resist film, and the terminals are ground by fitting a bite 19 onto the surface coated with the resist film while rotating the chuck table 17. COPYRIGHT: (C)2004,JPO |
