| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear scale which can be miniaturized, and performs high-precision measurement. SOLUTION: To the frame 14 of the linear scale, an outer cylinder 15 is attached. Into the outer cylinder 15, a spline shaft is inserted. In the outer cylinder 15, ball rolling portions 15a stretching in its axial direction are formed, and in the spline shaft 11 ball rolling grooves 11b being opposed to the rolling portions 15a are formed. Between each rolling groove 11b of the spline shaft 11 and each rolling portion 15a of the outer cylinder 15, two or more balls 16 which perform rolling motion are placed. The displacement of the spline shaft 11 is detected by a glass scale 22 and sensors 23, 24. COPYRIGHT: (C)2004,JPO
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