| 摘要 |
An apparatus images a surface. An imager stage linearly translates the surface in a first direction. A fiber optic bundle has a first end of parallel first fiber ends defining a linear input aperture perpendicular to the first direction and parallel to the surface, and a second end defining a generally circular output aperture. Each first fiber end optically communicates with the output aperture. A radiation beam linearly scans and interacts with the surface below the input aperture to produce a light signal that is collected by the input aperture and transmitted by the fiber bundle to the output aperture. A photodetector detects the light signal at the output aperture. A processor processes the detected light.
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