Resonators 4 and 5 are able to oscillate horizontally and vertically to substrate 1. Resonator 4 is primarily composed of a supporting portion in stationary contact with substrate 1, a movable portion including a contact surface making contact with resonator 5 and a contact surface making contact with electrode 7, and a crossing portion that couples the supporting portion and movable portion. Electrode 6 is disposed in the direction in which resonator 5 is spaced apart from resonator 4. Electrode 7 is disposed in the direction in which resonator 4 is spaced apart from resonator 5. Electrode 9 is disposed in a position that causes resonator 5 to generate electrostatic force in a direction different from the direction of both forces of attraction acting between resonators 4 and 5 and between resonator 5 and electrode 6.
申请公布号
WO03059805(A3)
申请公布日期
2004.04.15
申请号
WO2003JP00317
申请日期
2003.01.16
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;NAKANISHI, YOSHITO;SHIMIZU, YOSHITO;YABUKI, HIROYUKI