发明名称 |
Kohlenstoffdioxidlaser-Bearbeitungsverfahren von Mehrschichtmaterial |
摘要 |
In a carbon dioxide laser machining method of a multilayer material of applying carbon dioxide laser light to a machined part of a multilayer material having an insulation layer and a first conductor layer and a second conductor layer deposited with the insulation layer between and removing the first conductor layer and the insulation layer of the machined part to form a blind hole or a groove arriving at the second conductor layer, the laser light is applied to the machined part like pulses at an energy density of 25 J/cm<SUP>2 </SUP>or more for beam ON time in the range of 1 mus to 10 mus. |
申请公布号 |
DE10296376(T5) |
申请公布日期 |
2004.04.15 |
申请号 |
DE2002196376T |
申请日期 |
2002.03.20 |
申请人 |
MITSUBISHI DENKI K.K., TOKIO/TOKYO |
发明人 |
ITO, KENJI |
分类号 |
B23K26/382;H05K1/03;H05K3/00 |
主分类号 |
B23K26/382 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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