摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibration chip whose frequency can be adjusted by adopting a mass reduction method without substantially reducing the area of a region related to vibration of the piezoelectric vibration chip and giving adverse effect on the vibration characteristic and to provide a piezoelectric device utilizing the piezoelectric vibration chip. SOLUTION: The piezoelectric vibration chip is provided with: a pair of vibration arms 34, 35 made of a piezoelectric material and extended in parallel from a base; grooves 56, 57 provided to the vibration arms respectively and extended in the length direction; and a frequency adjustment section wherein island or peninsular regions are formed in the grooves and metal coating parts 61, 62 for adjustment purpose are provided on the surface of the regions. COPYRIGHT: (C)2004,JPO
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