| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric resonator, a piezoelectric filter, and a duplexer, with excellent heat dissipation and enhanced power withstanding performance, and also to provide communication equipment. SOLUTION: The piezoelectric resonator is provided with: a support substrate 10 having an opening or a recessed part; a information thin film 15 having one or more layers formed on the opening or the recessed part; a vibration part 11b having a structure whereby a pair of an upper electrode 16 and a lower electrode 14 opposed to each other are held between upper and lower faces of the piezoelectric thin film; and a heat dissipation film 18 which is formed at positions except the vibration part 11b and at least on either the upper electrode 16 or the piezoelectric thin film 15. COPYRIGHT: (C)2004,JPO
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