Micro-electromechanical device that incorporates a motion-transmitting structure

摘要

A micro-electromechanical device includes a substrate that incorporates drive circuitry. An elongate drive member is fast with the substrate at a fixed end and incorporates an electrical circuit that is in electrical contact with the drive circuitry to receive an electrical signal from the drive circuitry. The drive member is configured so that a free end is displaced relative to the substrate on receipt of the electrical signal. A motion-transmitting member is fast with the free end of the drive member so that the motion-transmitting member is displaced together with the free end. A working member is fast with the motion-transmitting member to be displaced together with the motion-transmitting member to perform work.