| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost differential pressure measurement device, having a miniaturized excessive pressure protective diaphragm. SOLUTION: The differential pressure measurement device includes a high-pressure side pre-weighting diaphragm, a low-pressure side excessive pressure conduction hole, a low-pressure side pre-weighting diaphragm, and a high-pressure side excessive pressure conduction hole. The high-pressure side pre-weighting diaphragm covers a high-pressure side back plate surface of a high-pressure side seal diaphragm room, constitutes the high-pressure side back plate surface and a low-pressure side excessive pressure room, is formed in a prescribed protruded shape in advance, and is pressed and mounted on the back plate surface at a prescribed pressure with the protruded side in contact with the back plate surface. The low-pressure side excessive pressure conduction hole is provided to the body, with one end thereof in communication with the low-pressure side excessive pressure room and the other end thereof, in communication with the low-pressure side conduction hole. The low-pressure side pre-weighting diaphragm covers the low-pressure side back plate surface of a low-pressure side seal diaphragm room, constitutes the low-pressure side back plate surface and the high-pressure side excessive pressure room, is formed in a prescribed protruded shape, in advance, and is pressed and mounted on the back plate surface at a prescribed pressure, with the protruded side in contact with the back plate surface. The high-pressure side excessive pressure conduction hole is provided to the body, with one end thereof, in communication with the high-pressure side excessive pressure room and the other end thereof in communication with the high-pressure side conduction hole. COPYRIGHT: (C)2004,JPO
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