| 摘要 |
PROBLEM TO BE SOLVED: To provide a prove card managing device and its managing method which prevent delay of maintenance, by giving warnings to notify a user time to perform maintenance for the probe card of each automatic handler for TAB automatically and by a precise period (each time when inspected units reaches a predetermined number, for example). SOLUTION: This managing device manages probe cards 21 by making handlers for TAB 32-34 detachable and attachable. The probe cards are provided with discrimination means 23 for discriminating the individual probe cards. Besides, this managing device is provided with counters for counting the numbers of times of rise and fall of pushers 24 by a controller 26, and a maintenance warning means for outputting warnings for maintenance of the probe cards, when the counts reach a predetermined value. COPYRIGHT: (C)2004,JPO
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