IMAGE MEASURING METHOD AND APPARATUS THEREOF

摘要

PROBLEM TO BE SOLVED: To reduce influence to a measurement value by the diffraction of light even in a work under transfer. SOLUTION: When the work 10 under transfer is subjected to image input by transmission lighting and a target 12 in the work is measured from the image, a measurement value is corrected by the difference between actual dimensions that are obtained in advance and the measurement value and a calibration curve 36 in the brightness of the background, thus reducing influence to the measurement value by the diffraction of light. COPYRIGHT: (C)2004,JPO