| 摘要 |
PROBLEM TO BE SOLVED: To provide a method by which homogeneous quartz glass having optically excellent homogeneity is easily manufactured without conducting homogenization treatment in a subsequent process. SOLUTION: The method for manufacturing homogeneous quartz glass has a constitution where silica powder 8 is charged into a container 4' made from quartz glass soot and heated with a microwave to be vitrified. The method has another constitution where the silica powder 8 is charged into the container 4' made from quartz glass soot, heated in the atmosphere of a compound gas or mixture gas containing a dopant element, and then heated with the microwave to be vitrified. Furthermore, the quartz glass soot is preferably produced with a VAD (vapor-phase axial deposition) method and the frequency of the microwave is preferably 20-300 GHz. COPYRIGHT: (C)2004,JPO
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