PROCESS FOR FORMING METAL OXIDE THIN FILM AND METAL OXIDE THIN FILM OBTAINED THROUGH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a metal oxide thin film formed at a lower temperature. SOLUTION: In a process for forming the thin film, the thin film of a metal oxide containing at least one metal element is formed on a substrate. The process comprises an application step wherein a sol-gel solution containing the metal element is applied onto the substrate, a subsequent drying step wherein the sol-gel solution is dried to form a dried gel film on the substrate, a subsequent soaking step wherein the substrate onto which the dried gel film is formed is soaked in an aqueous alkaline solution containing at least one metal element in a vessel, a sealing step wherein the vessel is sealed and a hydrothermal treatment step wherein the dried gel film is subjected to hydrothermal treatment in the sealed vessel to form the metal oxide thin film on the substrate. COPYRIGHT: (C)2004,JPO