摘要 |
PROBLEM TO BE SOLVED: To provide a compact decompression-driable device for continuously and efficiently decompressing and drying an object to be treated including a volatile unnecessary matter at a high speed without reducing the drying degree. SOLUTION: Before drying the object to be treated in an atmosphere of which pressure is lower than atmospheric pressure, heating or drying is performed in advance, and the object to be treated is continuously heated and dried in an atmosphere of which pressure is lower than the atmospheric pressure by electromagnetic induction in a decompressing chamber for holding airtightness by a roller. COPYRIGHT: (C)2004,JPO
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