发明名称 Method for producing fine structured member, method for producing fine hollow structured member and method for producing liquid discharge head
摘要 The invention is to provide a method for producing a fine structured member and a fine hollow structure, useful for producing a liquid discharge head which is inexpensive, precise and highly reliable, also to provide a method for producing a liquid discharge head utilizing such producing method for the fine structured member and the fine hollow structure and a liquid discharge head obtained by such producing method. A positive-working photosensitive material, including a ternary polymer containing an acrylate ester as a principal component, acrylic acid for thermal crosslinking and a monomer unit for expanding a sensitivity region, is used as a material for forming the fine structured member.
申请公布号 US2004072107(A1) 申请公布日期 2004.04.15
申请号 US20030615289 申请日期 2003.07.09
申请人 CANON KABUSHIKI KAISHA 发明人 KUBOTA MASAHIKO;TAGAWA YOSHINORI;HIYAMA WATARU;MASUKAWA TATSUYA;SHIBA SHOJI;KURIHARA YOSHIAKI;ISHIKURA HIROE;OKANO AKIHIKO
分类号 B41J2/16;(IPC1-7):G03F7/40;B41J2/01;G03F7/30 主分类号 B41J2/16
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