Supporting column and cassette using the same

摘要

A supporting column (30) of the present invention includes a main body (31) and a stiff shaft (33). The main body (31) includes a half-sleeve shaft (319) and a plurality of parallel wing panels (317) encircling portions of the half-sleeve shaft. The main body has a C-shaped cross section and defines an axial bore along an axis direction. The wing panels are formed perpendicular to the half-sleeve shaft and each wing panel provides a protrusion (318) in the middle of the wing panel. A cassette (40) incorporating the supporting columns is used to accommodate a plurality of substrates.