Method for forming nanocrystalline diamond films for cold electron emission using hot filament reactor

摘要

A method is provided for growing diamond films on substrates for formation of cold cathodes having high electron emission at a low electric field. High and uniform electron emission properties are obtained by growing the film in a hot filament reactor and in proximity to the surface of a heated grid made of graphite or other selected materials. The grid temperature is in the range of about 800° C. to about 2000° C. Mixtures of hydrogen and carbon-containing gases are used to forms the diamond.