| 摘要 |
A MEMS mirror and method for fabricating the mirror is provided. The mirror has a plurality of structures (101,105) that operatively rotate around a support structure (111). The mirror is fabricated, such that the silicon components are separated from a glass structure having electrodes (115) to prevent shorting of the electrodes to the mirror. Additionally, the electrodes are positioned such that providing electrical contact is eased. |
