| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slit coating type coating apparatus which can reduce the unevenness of film thicknesses particularly at the starting part and ending part of coating by making highly precise flow rate control performable. <P>SOLUTION: The coating apparatus is so constituted that the volume of a coating liquid from a pressure reducing valve 61 being a flow rate control means for the coating liquid to the leading end of a coating head 2 to be ≤100 cm<SP>3</SP>. <P>COPYRIGHT: (C)2004,JPO |
