| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film sensor for detecting the position of a movable element (moving member)which electrical machinery and apparatus have, with high precision. <P>SOLUTION: The film sensor is provided with a sensor substrate 1, and magnets fitted to the moving member 2 which travels in two dimensions along the direction of the surface of the sensor substrate 1. The sensor substrate 1 is a film substrate on which a large number of coils 1a are arranged into a matrix shape over in the whole moving region of the moving member 2. Accordingly, induced electromotive forces are generated in the coils 1a by electromagnetic induction action of the moving member 2 (magnets) which moves, and the position of the moving member 2 is detected by a controller 5. <P>COPYRIGHT: (C)2004,JPO</p> |
