| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film solar battery wherein superior optical confinement efficacy can be acquired and high photoelectric conversion efficiency is shown. <P>SOLUTION: The method for manufacturing a thin film solar battery is provided with a process for forming a first electrode layer on a substrate, a process for forming a photoelectric conversion layer on the first electrode layer, and a process for forming a second electrode layer on the photoelectric conversion layer. One out of the process for forming the first electrode layer and the process for forming the second electrode layer contains etching treatment wherein a transparently conductive layer is formed as an electrode layer and unevenness is formed on a surface of the formed transparently conductive layer. The etching treatment contains treatment wherein etching is performed at least twice on the surface of the transparently conductive layer by using acid etchant or etchant composed of alkaline solution. <P>COPYRIGHT: (C)2004,JPO</p> |
