| 摘要 |
PROBLEM TO BE SOLVED: To control the occurrence of mechanical damages and contamination in the substrate when the substrates are received without lowering the total processing speed. SOLUTION: While a first quartz susceptor 20 is stopped, a transfer jig 36 loading the substrate 12 is moved downward in the operating speed V1. When the substrate 12 is transferred to the first susceptor 20 from the transfer jig 36 while the transfer jig 36 is moved downward continuously in the operating speed V1, the first quartz susceptor 20 is moved downward in the operating speed V2' (V1 is larger than V2'), and the substrate 12 is transferred to the first quartz susceptor 20 from the transfer jig 36. COPYRIGHT: (C)2004,JPO |
