| 摘要 |
PROBLEM TO BE SOLVED: To provide a vessel for liquid raw material capable of knowing the amount of a liquid raw material existent in a non-transparent vessel body. SOLUTION: The vessel for liquid stock material is adapted such that a liquid stock material containing section 1 of an organic metal is provided, into which a carrier gas introducing piping 3 is inserted from above, and a lower end 3a of the piping 3 is introduced into a liquid stock material 2 in the liquid stock material containing section 1 to take out vapor of the liquid stock material from a raw material gas outlet piping 4 located upward. In the vessel for liquid stock material, a liquid level indicator for detecting a liquid stock material level or a liquid stock material level slightly higher than the former where bubbles of the carrier gas do not pass through the inside of the liquid stock material by inserting a pair of electrodes 5a, 5b from above such that tip ends thereof are located at a predetermined height. COPYRIGHT: (C)2004,JPO
|
