| 发明名称 |
WATERPROOF GATE INSULATION FILM |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a waterproof gate insulation film without deteriorating the dielectric characteristics of a rare earth element oxide gate insulation film. SOLUTION: As a method for improving the moisture resistance, Al of 0.5-60% is added in addition to a rare earth element. COPYRIGHT: (C)2004,JPO
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| 申请公布号 |
JP2004119447(A) |
申请公布日期 |
2004.04.15 |
| 申请号 |
JP20020277232 |
申请日期 |
2002.09.24 |
| 申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
SHIMIZU TAKASHI;YAMADA HIROTOSHI |
| 分类号 |
H01L21/316;H01L29/78;(IPC1-7):H01L29/78 |
主分类号 |
H01L21/316 |
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