| 摘要 |
PROBLEM TO BE SOLVED: To provide a device which washes the tip part of a slit nozzle without staining the surrounding part of the slit nozzle by using a small amount of washing liquid, and to provide a washing method thereof. SOLUTION: In the washing device for slit nozzle, the tip of the slit nozzle on which a coating liquid ejection port having a specified width is opened is moved along the longitudinal direction of the slit nozzle and, at the same time, is washed. Further, the washing device is provided with a washing liquid discharging means which is set shorter than the width along the longitudinal direction of the slit nozzle and produces misty washing liquid, an injecting port of washing liquid which injects the produced misty washing liquid against an inclined part of the tip of the slit nozzle, a gas ejecting port positioned on the upper part of the ejecting port of washing liquid and a gas ejecting means which ejects the gas. COPYRIGHT: (C)2004,JPO
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