Droplet discharge device and liquid filling method therefor, and device manufacturing apparatus, device manufacturing method and device

摘要

A droplet discharge device is provided which can maintain predetermined liquid discharge characteristics even in the case where a drawing liquid of a high viscosity is used. A droplet discharge device which discharges liquid filled into a droplet discharge head, has a filling apparatus which switches between a first liquid and a second liquid of a lower viscosity than the first liquid, and fills the droplet discharge head.