发明名称 OPTICAL ELEMENT FOR SCANNING SYSTEM AND METHOD OF MANUFACTURE THEREOF
摘要 An optical element is disclosed for use in a scanning system. The optical element comprises a carbon-based substrate having a first specific stiffness, and a titanium carbide coating having a second specific stiffness. The carbon-based substrate and the titanium carbide coating form a composite having a desired shape. The composite has a third specific stiffness that is greater than the first specific stiffness and greater than the second specific stiffness.
申请公布号 WO03093873(A3) 申请公布日期 2004.04.15
申请号 WO2002US30405 申请日期 2002.09.25
申请人 GSI LUMONICS CORPORATION 发明人 KAPLAN, ALVARO;NUSSBAUM, MICHAEL, B.
分类号 G02B5/08;G02B26/10 主分类号 G02B5/08
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